Expanding the zinc precursor toolbox: a comparative study of precursors for thermal ALD of ZnO thin films

Jorit Obenlüneschloß, Rajesh Pathak, Vepa Rozyyev, Anil U. Mane, Thomas Gemming, Detlef Rogalla, Jeffrey W. Elam, Anjana Devi

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DOI: 10.1039/d5dt02379c
Published: 2026
Container: Dalton Transactions
Publisher: Royal Society of Chemistry (RSC)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1039/d5dt02379c,
  title = {Expanding the zinc precursor toolbox: a comparative study of precursors for thermal ALD of ZnO thin films},
  author = {Jorit Obenlüneschloß and Rajesh Pathak and Vepa Rozyyev and Anil U. Mane and Thomas Gemming and Detlef Rogalla and Jeffrey W. Elam and Anjana Devi},
  year = {2026},
  journal = {Dalton Transactions},
  doi = {10.1039/d5dt02379c},
  url = {https://doi.org/10.1039/d5dt02379c}
}

RIS

TY  - JOUR
TI  - Expanding the zinc precursor toolbox: a comparative study of precursors for thermal ALD of ZnO thin films
AU  - Jorit Obenlüneschloß
AU  - Rajesh Pathak
AU  - Vepa Rozyyev
AU  - Anil U. Mane
AU  - Thomas Gemming
AU  - Detlef Rogalla
AU  - Jeffrey W. Elam
AU  - Anjana Devi
PY  - 2026
JO  - Dalton Transactions
DO  - 10.1039/d5dt02379c
UR  - https://doi.org/10.1039/d5dt02379c
ER  -

APA

Obenlüneschloß, J., Pathak, R., Rozyyev, V., Mane, A. U., Gemming, T., Rogalla, D., Elam, J. W., & Devi, A. (2026). Expanding the zinc precursor toolbox: a comparative study of precursors for thermal ALD of ZnO thin films. Dalton Transactions. https://doi.org/10.1039/d5dt02379c

Source records

crossref · retrieved 2026-09-26T12:51:48.929Z