Development and characterization of a chemically amplified positive-tone hybrid resist for thick-film microfabrication.

Nasrallah N, Calas S, Etienne P.

Open source

DOI
10.1039/d6ra01627h
Published
2026-07-27
Container
RSC Adv
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1039/d6ra01627h,
  title = {Development and characterization of a chemically amplified positive-tone hybrid resist for thick-film microfabrication.},
  author = {Nasrallah N and  Calas S and  Etienne P.},
  year = {2026},
  journal = {RSC Adv},
  doi = {10.1039/d6ra01627h},
  url = {https://doi.org/10.1039/d6ra01627h}
}

RIS

TY  - JOUR
TI  - Development and characterization of a chemically amplified positive-tone hybrid resist for thick-film microfabrication.
AU  - Nasrallah N
AU  -  Calas S
AU  -  Etienne P.
PY  - 2026
JO  - RSC Adv
DO  - 10.1039/d6ra01627h
UR  - https://doi.org/10.1039/d6ra01627h
ER  - 

APA

N, N., S, C., & P., E. (2026). Development and characterization of a chemically amplified positive-tone hybrid resist for thick-film microfabrication.. RSC Adv. https://doi.org/10.1039/d6ra01627h

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