Air-annealing-induced vertical elemental gradients regulate defect chemistry and optoelectronic properties of cylindrical-target-sputtered ITO thin films

Bingsen Shi, Shicheng Huang, Man Mo, Zhijie Fang

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DOI: 10.1039/d6ra07982b
Published: 2026
Container: RSC Advances
Publisher: Royal Society of Chemistry (RSC)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1039/d6ra07982b,
  title = {Air-annealing-induced vertical elemental gradients regulate defect chemistry and optoelectronic properties of cylindrical-target-sputtered ITO thin films},
  author = {Bingsen Shi and Shicheng Huang and Man Mo and Zhijie Fang},
  year = {2026},
  journal = {RSC Advances},
  doi = {10.1039/d6ra07982b},
  url = {https://doi.org/10.1039/d6ra07982b}
}

RIS

TY  - JOUR
TI  - Air-annealing-induced vertical elemental gradients regulate defect chemistry and optoelectronic properties of cylindrical-target-sputtered ITO thin films
AU  - Bingsen Shi
AU  - Shicheng Huang
AU  - Man Mo
AU  - Zhijie Fang
PY  - 2026
JO  - RSC Advances
DO  - 10.1039/d6ra07982b
UR  - https://doi.org/10.1039/d6ra07982b
ER  -

APA

Shi, B., Huang, S., Mo, M., & Fang, Z. (2026). Air-annealing-induced vertical elemental gradients regulate defect chemistry and optoelectronic properties of cylindrical-target-sputtered ITO thin films. RSC Advances. https://doi.org/10.1039/d6ra07982b

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crossref · retrieved 2026-11-06T05:26:08.952Z