Resolution enhancement methods in optical microscopy for dimensional optical metrology

Nouri Mohammad, Olivero Paolo, Kroker Stefanie, Käseberg Tim, Ruo-Berchera Ivano, Bodermann Bernd, Tyagi Himanshu, Roy Deb, Mukherjee Deshabrato, Siefke Thomas, Hansen Poul Erik, Rømer Astrid Tranum, Valtr Miroslav, Aprà Pietro, Petrik Peter

Open source

DOI: 10.1051/jeos/2025002
Published: 2025
Container: Journal of the European Optical Society-Rapid Publications
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1051/jeos/2025002,
  title = {Resolution enhancement methods in optical microscopy for dimensional optical metrology},
  author = {Nouri Mohammad and Olivero Paolo and Kroker Stefanie and Käseberg Tim and Ruo-Berchera Ivano and Bodermann Bernd and Tyagi Himanshu and Roy Deb and Mukherjee Deshabrato and Siefke Thomas and Hansen Poul Erik and Rømer Astrid Tranum and Valtr Miroslav and Aprà Pietro and Petrik Peter},
  year = {2025},
  journal = {Journal of the European Optical Society-Rapid Publications},
  doi = {10.1051/jeos/2025002},
  url = {https://doi.org/10.1051/jeos/2025002}
}

RIS

TY  - JOUR
TI  - Resolution enhancement methods in optical microscopy for dimensional optical metrology
AU  - Nouri Mohammad
AU  - Olivero Paolo
AU  - Kroker Stefanie
AU  - Käseberg Tim
AU  - Ruo-Berchera Ivano
AU  - Bodermann Bernd
AU  - Tyagi Himanshu
AU  - Roy Deb
AU  - Mukherjee Deshabrato
AU  - Siefke Thomas
AU  - Hansen Poul Erik
AU  - Rømer Astrid Tranum
AU  - Valtr Miroslav
AU  - Aprà Pietro
AU  - Petrik Peter
PY  - 2025
JO  - Journal of the European Optical Society-Rapid Publications
DO  - 10.1051/jeos/2025002
UR  - https://doi.org/10.1051/jeos/2025002
ER  -

APA

Mohammad, N., Paolo, O., Stefanie, K., Tim, K., Ivano, R., Bernd, B., Himanshu, T., Deb, R., Deshabrato, M., Thomas, S., Erik, H. P., Tranum, R. A., Miroslav, V., Pietro, A., & Peter, P. (2025). Resolution enhancement methods in optical microscopy for dimensional optical metrology. Journal of the European Optical Society-Rapid Publications. https://doi.org/10.1051/jeos/2025002

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doaj · retrieved 2026-09-27T05:59:54.272Z