Advanced microstructure products by synchrotron radiation lithography

H. Lehr, W. Ehrfeld

Open source

DOI: 10.1051/jp4:1994941
Published: 1994-11
Container: Le Journal de Physique IV
Publisher: EDP Sciences
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1051/jp4:1994941,
  title = {Advanced microstructure products by synchrotron radiation lithography},
  author = {H. Lehr and W. Ehrfeld},
  year = {1994},
  journal = {Le Journal de Physique IV},
  doi = {10.1051/jp4:1994941},
  url = {https://doi.org/10.1051/jp4:1994941}
}

RIS

TY  - JOUR
TI  - Advanced microstructure products by synchrotron radiation lithography
AU  - H. Lehr
AU  - W. Ehrfeld
PY  - 1994
JO  - Le Journal de Physique IV
DO  - 10.1051/jp4:1994941
UR  - https://doi.org/10.1051/jp4:1994941
ER  -

APA

Lehr, H., & Ehrfeld, W. (1994). Advanced microstructure products by synchrotron radiation lithography. Le Journal de Physique IV. https://doi.org/10.1051/jp4:1994941

Source records

crossref · retrieved 2026-11-10T10:34:32.492Z