REACTION KINETICS OF MoSi<sub>2</sub> SILICIDE OBTAINED BY cw LASER ANNEALING OF Si (a) AND Si<sub>poly</sub>/Mo BILAYERS
- DOI
- 10.1051/jphyscol:1983567
- Published
- 1983-10
- Container
- Le Journal de Physique Colloques
- Publisher
- EDP Sciences
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1051/jphyscol:1983567,
title = {REACTION KINETICS OF MoSi<sub>2</sub> SILICIDE OBTAINED BY cw LASER ANNEALING OF Si (a) AND Si<sub>poly</sub>/Mo BILAYERS},
author = {J. Torres and G. Bomchil and Y. Pauleau and Ph. Lami and G. Auvert},
year = {1983},
journal = {Le Journal de Physique Colloques},
doi = {10.1051/jphyscol:1983567},
url = {https://doi.org/10.1051/jphyscol:1983567}
}RIS
TY - JOUR TI - REACTION KINETICS OF MoSi<sub>2</sub> SILICIDE OBTAINED BY cw LASER ANNEALING OF Si (a) AND Si<sub>poly</sub>/Mo BILAYERS AU - J. Torres AU - G. Bomchil AU - Y. Pauleau AU - Ph. Lami AU - G. Auvert PY - 1983 JO - Le Journal de Physique Colloques DO - 10.1051/jphyscol:1983567 UR - https://doi.org/10.1051/jphyscol:1983567 ER -
APA
Torres, J., Bomchil, G., Pauleau, Y., Lami, P., & Auvert, G. (1983). REACTION KINETICS OF MoSi<sub>2</sub> SILICIDE OBTAINED BY cw LASER ANNEALING OF Si (a) AND Si<sub>poly</sub>/Mo BILAYERS. Le Journal de Physique Colloques. https://doi.org/10.1051/jphyscol:1983567
Source records
- crossref · retrieved 2026-09-25T01:15:06.856Z