SPUTTERING OF A FIM SPECIMEN BY IMAGING GASES

S. NAKAMURA, T. HASHIZUME, T. SAKURAI

Open source

DOI: 10.1051/jphyscol:1986266
Published: 1986-03
Container: Le Journal de Physique Colloques
Publisher: EDP Sciences
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1051/jphyscol:1986266,
  title = {SPUTTERING OF A FIM SPECIMEN BY IMAGING GASES},
  author = {S. NAKAMURA and T. HASHIZUME and T. SAKURAI},
  year = {1986},
  journal = {Le Journal de Physique Colloques},
  doi = {10.1051/jphyscol:1986266},
  url = {https://doi.org/10.1051/jphyscol:1986266}
}

RIS

TY  - JOUR
TI  - SPUTTERING OF A FIM SPECIMEN BY IMAGING GASES
AU  - S. NAKAMURA
AU  - T. HASHIZUME
AU  - T. SAKURAI
PY  - 1986
JO  - Le Journal de Physique Colloques
DO  - 10.1051/jphyscol:1986266
UR  - https://doi.org/10.1051/jphyscol:1986266
ER  -

APA

NAKAMURA, S., HASHIZUME, T., & SAKURAI, T. (1986). SPUTTERING OF A FIM SPECIMEN BY IMAGING GASES. Le Journal de Physique Colloques. https://doi.org/10.1051/jphyscol:1986266

Source records

crossref · retrieved 2026-09-25T16:57:12.805Z