Oxide thickness dependence of swift heavy ion-induced surface tracks formation in silicon dioxide on silicon structures at grazing incidence

A.M.J.F. Carvalho, Antoine Touboul, M. Marinoni, M. Ramonda, C. Guasch, Frédéric Saigné, J. Bonnet, J. Gasiot

Open source

DOI
10.1063/1.2826708
Published
2007-12-15
Container
Journal of Applied Physics
Publisher
Not recorded
Open access
no

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BibTeX

@article{allodium:10.1063/1.2826708,
  title = {Oxide thickness dependence of swift heavy ion-induced surface tracks formation in silicon dioxide on silicon structures at grazing incidence},
  author = {A.M.J.F. Carvalho and Antoine Touboul and M. Marinoni and M. Ramonda and C. Guasch and Frédéric Saigné and J. Bonnet and J. Gasiot},
  year = {2007},
  journal = {Journal of Applied Physics},
  doi = {10.1063/1.2826708},
  url = {https://doi.org/10.1063/1.2826708}
}

RIS

TY  - JOUR
TI  - Oxide thickness dependence of swift heavy ion-induced surface tracks formation in silicon dioxide on silicon structures at grazing incidence
AU  - A.M.J.F. Carvalho
AU  - Antoine Touboul
AU  - M. Marinoni
AU  - M. Ramonda
AU  - C. Guasch
AU  - Frédéric Saigné
AU  - J. Bonnet
AU  - J. Gasiot
PY  - 2007
JO  - Journal of Applied Physics
DO  - 10.1063/1.2826708
UR  - https://doi.org/10.1063/1.2826708
ER  - 

APA

Carvalho, A., Touboul, A., Marinoni, M., Ramonda, M., Guasch, C., Saigné, F., Bonnet, J., & Gasiot, J. (2007). Oxide thickness dependence of swift heavy ion-induced surface tracks formation in silicon dioxide on silicon structures at grazing incidence. Journal of Applied Physics. https://doi.org/10.1063/1.2826708

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