Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
- DOI
- 10.1063/1.4727741
- Published
- 6
- Container
- AIP Advances
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1063/1.4727741,
title = {Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers},
author = {M. Malak and A.-F. Obaton and F. Marty and N. Pavy and S. Didelon and P. Basset and T. Bourouina},
year = {2012},
journal = {AIP Advances},
doi = {10.1063/1.4727741},
url = {https://doi.org/10.1063/1.4727741}
}RIS
TY - JOUR TI - Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers AU - M. Malak AU - A.-F. Obaton AU - F. Marty AU - N. Pavy AU - S. Didelon AU - P. Basset AU - T. Bourouina PY - 2012 JO - AIP Advances DO - 10.1063/1.4727741 UR - https://doi.org/10.1063/1.4727741 ER -
APA
Malak, M., Obaton, A., Marty, F., Pavy, N., Didelon, S., Basset, P., & Bourouina, T. (2012). Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers. AIP Advances. https://doi.org/10.1063/1.4727741
Source records
- doaj · retrieved 2026-09-26T21:54:44.614Z