Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, T. Bourouina

Open source

DOI
10.1063/1.4727741
Published
6
Container
AIP Advances
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1063/1.4727741,
  title = {Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers},
  author = {M. Malak and A.-F. Obaton and F. Marty and N. Pavy and S. Didelon and P. Basset and T. Bourouina},
  year = {2012},
  journal = {AIP Advances},
  doi = {10.1063/1.4727741},
  url = {https://doi.org/10.1063/1.4727741}
}

RIS

TY  - JOUR
TI  - Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
AU  - M. Malak
AU  - A.-F. Obaton
AU  - F. Marty
AU  - N. Pavy
AU  - S. Didelon
AU  - P. Basset
AU  - T. Bourouina
PY  - 2012
JO  - AIP Advances
DO  - 10.1063/1.4727741
UR  - https://doi.org/10.1063/1.4727741
ER  - 

APA

Malak, M., Obaton, A., Marty, F., Pavy, N., Didelon, S., Basset, P., & Bourouina, T. (2012). Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers. AIP Advances. https://doi.org/10.1063/1.4727741

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