Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In₂O₃ from In(tmhd)₃ as a solid precursor.
- DOI
- 10.1063/1.4940930
- Published
- 2016-02-01
- Container
- Rev Sci Instrum
- Publisher
- Not recorded
- Open access
- no
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Cite this work
BibTeX
@article{allodium:10.1063/1.4940930,
title = {Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In₂O₃ from In(tmhd)₃ as a solid precursor.},
author = {Szkutnik PD and Angélidès L and Todorova V and Jiménez C.},
year = {2016},
journal = {Rev Sci Instrum},
doi = {10.1063/1.4940930},
url = {https://doi.org/10.1063/1.4940930}
}RIS
TY - JOUR TI - Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In₂O₃ from In(tmhd)₃ as a solid precursor. AU - Szkutnik PD AU - Angélidès L AU - Todorova V AU - Jiménez C. PY - 2016 JO - Rev Sci Instrum DO - 10.1063/1.4940930 UR - https://doi.org/10.1063/1.4940930 ER -
APA
PD, S., L, A., V, T., & C., J. (2016). Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In₂O₃ from In(tmhd)₃ as a solid precursor.. Rev Sci Instrum. https://doi.org/10.1063/1.4940930
Source records
- europe-pmc · retrieved 2026-09-26T18:48:34.748Z
- hal · retrieved 2026-09-26T18:48:34.832Z