Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance.
- DOI
- 10.1063/1.4946788
- Published
- 2016 Apr
- Container
- The Review of scientific instruments
- Publisher
- Not recorded
- Open access
- no
Credibility signals
limited evidence Score 43/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
Show all credibility signals
- cautionDOI registered: No matching Crossref record was present in this response.
- cautionDOI resolves: No matching Crossref record was present in this response.
- not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility.
- not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made.
- not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made.
- not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made.
- not scoredROR affiliation: Not checked or no result supplied; no credibility inference made.
- not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredOpen access status: Not checked or no result supplied; no credibility inference made.
- not scoredPublication license: Not checked or no result supplied; no credibility inference made.
- not scoredPublication version: A publication version was supplied but is not scored.
- cautionMetadata completeness: 5 of 6 scored descriptive metadata groups are present; missing fields increase uncertainty.
Cite this work
BibTeX
@article{allodium:10.1063/1.4946788,
title = {Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance.},
author = {Sharma S and Gahan D and Scullin P and Doyle J and Lennon J and Vijayaraghavan RK and Daniels S and Hopkins MB},
year = {2016},
journal = {The Review of scientific instruments},
doi = {10.1063/1.4946788},
url = {https://doi.org/10.1063/1.4946788}
}RIS
TY - JOUR TI - Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance. AU - Sharma S AU - Gahan D AU - Scullin P AU - Doyle J AU - Lennon J AU - Vijayaraghavan RK AU - Daniels S AU - Hopkins MB PY - 2016 JO - The Review of scientific instruments DO - 10.1063/1.4946788 UR - https://doi.org/10.1063/1.4946788 ER -
APA
S, S., D, G., P, S., J, D., J, L., RK, V., S, D., & MB, H. (2016). Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance.. The Review of scientific instruments. https://doi.org/10.1063/1.4946788
Source records
- pubmed · retrieved 2026-09-25T18:03:56.218Z
- europe-pmc · retrieved 2026-09-25T18:03:56.231Z