High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor
- DOI
- 10.1063/1.5037721
- Published
- 2018-06-01
- Container
- AIP Advances
- Publisher
- AIP Publishing
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1063/1.5037721,
title = {High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor},
author = {Shaoxu Dou and Mengke Qi and Cong Chen and Hong Zhou and Yong Wang and Zhengguo Shang and Jing Yang and Dengpan Wang and Xiaojing Mu},
year = {2018},
journal = {AIP Advances},
doi = {10.1063/1.5037721},
url = {https://doi.org/10.1063/1.5037721}
}RIS
TY - JOUR TI - High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor AU - Shaoxu Dou AU - Mengke Qi AU - Cong Chen AU - Hong Zhou AU - Yong Wang AU - Zhengguo Shang AU - Jing Yang AU - Dengpan Wang AU - Xiaojing Mu PY - 2018 JO - AIP Advances DO - 10.1063/1.5037721 UR - https://doi.org/10.1063/1.5037721 ER -
APA
Dou, S., Qi, M., Chen, C., Zhou, H., Wang, Y., Shang, Z., Yang, J., Wang, D., & Mu, X. (2018). High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor. AIP Advances. https://doi.org/10.1063/1.5037721
Source records
- crossref · retrieved 2026-09-25T06:37:52.537Z