The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.
- DOI
- 10.1063/1.5128561
- Published
- 2019 Dec 1
- Container
- The Review of scientific instruments
- Publisher
- Not recorded
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1063/1.5128561,
title = {The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.},
author = {Seleznev D and Kozlov A and Kulevoy T and Sitnikov A and Lazarenko P and Vorobyov Y and Smayev M and Yakubov A and Sherchenkov A and Kozyukhin S},
year = {2019},
journal = {The Review of scientific instruments},
doi = {10.1063/1.5128561},
url = {https://doi.org/10.1063/1.5128561}
}RIS
TY - JOUR TI - The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. AU - Seleznev D AU - Kozlov A AU - Kulevoy T AU - Sitnikov A AU - Lazarenko P AU - Vorobyov Y AU - Smayev M AU - Yakubov A AU - Sherchenkov A AU - Kozyukhin S PY - 2019 JO - The Review of scientific instruments DO - 10.1063/1.5128561 UR - https://doi.org/10.1063/1.5128561 ER -
APA
D, S., A, K., T, K., A, S., P, L., Y, V., M, S., A, Y., A, S., & S, K. (2019). The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.. The Review of scientific instruments. https://doi.org/10.1063/1.5128561
Source records
- pubmed · retrieved 2026-09-25T20:35:49.939Z