The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.

Seleznev D, Kozlov A, Kulevoy T, Sitnikov A, Lazarenko P, Vorobyov Y, Smayev M, Yakubov A, Sherchenkov A, Kozyukhin S

Open source

DOI
10.1063/1.5128561
Published
2019 Dec 1
Container
The Review of scientific instruments
Publisher
Not recorded
Open access
unknown

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BibTeX

@article{allodium:10.1063/1.5128561,
  title = {The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.},
  author = {Seleznev D and Kozlov A and Kulevoy T and Sitnikov A and Lazarenko P and Vorobyov Y and Smayev M and Yakubov A and Sherchenkov A and Kozyukhin S},
  year = {2019},
  journal = {The Review of scientific instruments},
  doi = {10.1063/1.5128561},
  url = {https://doi.org/10.1063/1.5128561}
}

RIS

TY  - JOUR
TI  - The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.
AU  - Seleznev D
AU  - Kozlov A
AU  - Kulevoy T
AU  - Sitnikov A
AU  - Lazarenko P
AU  - Vorobyov Y
AU  - Smayev M
AU  - Yakubov A
AU  - Sherchenkov A
AU  - Kozyukhin S
PY  - 2019
JO  - The Review of scientific instruments
DO  - 10.1063/1.5128561
UR  - https://doi.org/10.1063/1.5128561
ER  - 

APA

D, S., A, K., T, K., A, S., P, L., Y, V., M, S., A, Y., A, S., & S, K. (2019). The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.. The Review of scientific instruments. https://doi.org/10.1063/1.5128561

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