Controlling the relaxation mechanism of low strain Si1−<i>x</i>Ge<i>x</i>/Si(001) layers and reducing the threading dislocation density by providing a preexisting dislocation source

L. Becker, P. Storck, T. Schulz, M. H. Zoellner, L. Di Gaspare, F. Rovaris, A. Marzegalli, F. Montalenti, M. De Seta, G. Capellini, G. Schwalb, T. Schroeder, M. Albrecht

Open source

DOI
10.1063/5.0032454
Published
2020-12-04
Container
Journal of Applied Physics
Publisher
AIP Publishing
Open access
unknown

Credibility signals

uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

Cite this work

BibTeX

@article{allodium:10.1063/5.0032454,
  title = {Controlling the relaxation mechanism of low strain Si1−<i>x</i>Ge<i>x</i>/Si(001) layers and reducing the threading dislocation density by providing a preexisting dislocation source},
  author = {L. Becker and P. Storck and T. Schulz and M. H. Zoellner and L. Di Gaspare and F. Rovaris and A. Marzegalli and F. Montalenti and M. De Seta and G. Capellini and G. Schwalb and T. Schroeder and M. Albrecht},
  year = {2020},
  journal = {Journal of Applied Physics},
  doi = {10.1063/5.0032454},
  url = {https://doi.org/10.1063/5.0032454}
}

RIS

TY  - JOUR
TI  - Controlling the relaxation mechanism of low strain Si1−<i>x</i>Ge<i>x</i>/Si(001) layers and reducing the threading dislocation density by providing a preexisting dislocation source
AU  - L. Becker
AU  - P. Storck
AU  - T. Schulz
AU  - M. H. Zoellner
AU  - L. Di Gaspare
AU  - F. Rovaris
AU  - A. Marzegalli
AU  - F. Montalenti
AU  - M. De Seta
AU  - G. Capellini
AU  - G. Schwalb
AU  - T. Schroeder
AU  - M. Albrecht
PY  - 2020
JO  - Journal of Applied Physics
DO  - 10.1063/5.0032454
UR  - https://doi.org/10.1063/5.0032454
ER  - 

APA

Becker, L., Storck, P., Schulz, T., Zoellner, M. H., Gaspare, L. D., Rovaris, F., Marzegalli, A., Montalenti, F., Seta, M. D., Capellini, G., Schwalb, G., Schroeder, T., & Albrecht, M. (2020). Controlling the relaxation mechanism of low strain Si1−<i>x</i>Ge<i>x</i>/Si(001) layers and reducing the threading dislocation density by providing a preexisting dislocation source. Journal of Applied Physics. https://doi.org/10.1063/5.0032454

Source records