Simultaneous measurement of fine pattern shape and overall shape by a nano-profiler.

Miyawaki T, Endo K

DOI: 10.1063/5.0118712
Published: 2022 Dec 1
Container: The Review of scientific instruments
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1063/5.0118712,
  title = {Simultaneous measurement of fine pattern shape and overall shape by a nano-profiler.},
  author = {Miyawaki T and Endo K},
  year = {2022},
  journal = {The Review of scientific instruments},
  doi = {10.1063/5.0118712},
  url = {https://doi.org/10.1063/5.0118712}
}

RIS

TY  - JOUR
TI  - Simultaneous measurement of fine pattern shape and overall shape by a nano-profiler.
AU  - Miyawaki T
AU  - Endo K
PY  - 2022
JO  - The Review of scientific instruments
DO  - 10.1063/5.0118712
UR  - https://doi.org/10.1063/5.0118712
ER  -

APA

T, M., & K, E. (2022). Simultaneous measurement of fine pattern shape and overall shape by a nano-profiler.. The Review of scientific instruments. https://doi.org/10.1063/5.0118712

Source records

pubmed · retrieved 2026-09-26T17:48:17.818Z