Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films
- DOI
- 10.1063/5.0148807
- Published
- 2023-07-01
- Container
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1063/5.0148807,
title = {Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films},
author = {Nivin Alktash and Ruslan Muydinov and Darja Erfurt and Manuel Hartig and Wojciech Gajewski and Bernd Szyszka},
year = {2023},
journal = {Review of Scientific Instruments},
doi = {10.1063/5.0148807},
url = {https://doi.org/10.1063/5.0148807}
}RIS
TY - JOUR TI - Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films AU - Nivin Alktash AU - Ruslan Muydinov AU - Darja Erfurt AU - Manuel Hartig AU - Wojciech Gajewski AU - Bernd Szyszka PY - 2023 JO - Review of Scientific Instruments DO - 10.1063/5.0148807 UR - https://doi.org/10.1063/5.0148807 ER -
APA
Alktash, N., Muydinov, R., Erfurt, D., Hartig, M., Gajewski, W., & Szyszka, B. (2023). Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films. Review of Scientific Instruments. https://doi.org/10.1063/5.0148807
Source records
- crossref · retrieved 2026-09-25T07:14:17.270Z