Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties

Maciej Haras, Jean-François Robillard, Thomas Skotnicki, Emmanuel Dubois

Open source

DOI: 10.1063/5.0152192
Published: 2023-07-14
Container: Journal of Applied Physics
Publisher: AIP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1063/5.0152192,
  title = {Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties},
  author = {Maciej Haras and Jean-François Robillard and Thomas Skotnicki and Emmanuel Dubois},
  year = {2023},
  journal = {Journal of Applied Physics},
  doi = {10.1063/5.0152192},
  url = {https://doi.org/10.1063/5.0152192}
}

RIS

TY  - JOUR
TI  - Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties
AU  - Maciej Haras
AU  - Jean-François Robillard
AU  - Thomas Skotnicki
AU  - Emmanuel Dubois
PY  - 2023
JO  - Journal of Applied Physics
DO  - 10.1063/5.0152192
UR  - https://doi.org/10.1063/5.0152192
ER  -

APA

Haras, M., Robillard, J., Skotnicki, T., & Dubois, E. (2023). Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties. Journal of Applied Physics. https://doi.org/10.1063/5.0152192

Source records

crossref · retrieved 2026-09-27T07:46:18.393Z