A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

Bingxiao Ding, Xuan Li, Chenglin Li, Yangmin Li, Shih-Chi Chen

Open source

DOI: 10.1063/5.0162246
Published: 2023-10-01
Container: Review of Scientific Instruments
Publisher: AIP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1063/5.0162246,
  title = {A survey on the mechanical design for piezo-actuated compliant micro-positioning stages},
  author = {Bingxiao Ding and Xuan Li and Chenglin Li and Yangmin Li and Shih-Chi Chen},
  year = {2023},
  journal = {Review of Scientific Instruments},
  doi = {10.1063/5.0162246},
  url = {https://doi.org/10.1063/5.0162246}
}

RIS

TY  - JOUR
TI  - A survey on the mechanical design for piezo-actuated compliant micro-positioning stages
AU  - Bingxiao Ding
AU  - Xuan Li
AU  - Chenglin Li
AU  - Yangmin Li
AU  - Shih-Chi Chen
PY  - 2023
JO  - Review of Scientific Instruments
DO  - 10.1063/5.0162246
UR  - https://doi.org/10.1063/5.0162246
ER  -

APA

Ding, B., Li, X., Li, C., Li, Y., & Chen, S. (2023). A survey on the mechanical design for piezo-actuated compliant micro-positioning stages. Review of Scientific Instruments. https://doi.org/10.1063/5.0162246

Source records

crossref · retrieved 2026-11-10T09:48:09.085Z