Broadband coherent Fourier scatterometry: A two-pulse approach

T. A. van der Sijs, J. Rafighdoost, L. Siaudinyte, H. P. Urbach, S. F. Pereira, O. El Gawhary

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DOI: 10.1063/5.0226043
Published: 2025-01-01
Container: Review of Scientific Instruments
Publisher: AIP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1063/5.0226043,
  title = {Broadband coherent Fourier scatterometry: A two-pulse approach},
  author = {T. A. van der Sijs and J. Rafighdoost and L. Siaudinyte and H. P. Urbach and S. F. Pereira and O. El Gawhary},
  year = {2025},
  journal = {Review of Scientific Instruments},
  doi = {10.1063/5.0226043},
  url = {https://doi.org/10.1063/5.0226043}
}

RIS

TY  - JOUR
TI  - Broadband coherent Fourier scatterometry: A two-pulse approach
AU  - T. A. van der Sijs
AU  - J. Rafighdoost
AU  - L. Siaudinyte
AU  - H. P. Urbach
AU  - S. F. Pereira
AU  - O. El Gawhary
PY  - 2025
JO  - Review of Scientific Instruments
DO  - 10.1063/5.0226043
UR  - https://doi.org/10.1063/5.0226043
ER  -

APA

Sijs, T. A. V. D., Rafighdoost, J., Siaudinyte, L., Urbach, H. P., Pereira, S. F., & Gawhary, O. E. (2025). Broadband coherent Fourier scatterometry: A two-pulse approach. Review of Scientific Instruments. https://doi.org/10.1063/5.0226043

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crossref · retrieved 2026-09-26T00:49:52.347Z