Development of an in-vacuum long trace profiler for in situ measurement of optical components.

Lin SW, Chiu CC, Hsu MY, Chang CF, Chen BY, Yin GC

DOI: 10.1063/5.0256054
Published: 2025 Sep 1
Container: The Review of scientific instruments
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1063/5.0256054,
  title = {Development of an in-vacuum long trace profiler for in situ measurement of optical components.},
  author = {Lin SW and Chiu CC and Hsu MY and Chang CF and Chen BY and Yin GC},
  year = {2025},
  journal = {The Review of scientific instruments},
  doi = {10.1063/5.0256054},
  url = {https://doi.org/10.1063/5.0256054}
}

RIS

TY  - JOUR
TI  - Development of an in-vacuum long trace profiler for in situ measurement of optical components.
AU  - Lin SW
AU  - Chiu CC
AU  - Hsu MY
AU  - Chang CF
AU  - Chen BY
AU  - Yin GC
PY  - 2025
JO  - The Review of scientific instruments
DO  - 10.1063/5.0256054
UR  - https://doi.org/10.1063/5.0256054
ER  -

APA

SW, L., CC, C., MY, H., CF, C., BY, C., & GC, Y. (2025). Development of an in-vacuum long trace profiler for in situ measurement of optical components.. The Review of scientific instruments. https://doi.org/10.1063/5.0256054

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pubmed · retrieved 2026-09-25T02:33:00.157Z