Design of a novel intelligent active magnetic canceling system for mitigating extremely low frequency magnetic interference in high tech fab.

Song YL, Cheng YY, Lin HY, Chang LM

Open source

DOI
10.1063/5.0305429
Published
2026 Sep 1
Container
The Review of scientific instruments
Publisher
Not recorded
Open access
unknown

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BibTeX

@article{allodium:10.1063/5.0305429,
  title = {Design of a novel intelligent active magnetic canceling system for mitigating extremely low frequency magnetic interference in high tech fab.},
  author = {Song YL and Cheng YY and Lin HY and Chang LM},
  year = {2026},
  journal = {The Review of scientific instruments},
  doi = {10.1063/5.0305429},
  url = {https://doi.org/10.1063/5.0305429}
}

RIS

TY  - JOUR
TI  - Design of a novel intelligent active magnetic canceling system for mitigating extremely low frequency magnetic interference in high tech fab.
AU  - Song YL
AU  - Cheng YY
AU  - Lin HY
AU  - Chang LM
PY  - 2026
JO  - The Review of scientific instruments
DO  - 10.1063/5.0305429
UR  - https://doi.org/10.1063/5.0305429
ER  - 

APA

YL, S., YY, C., HY, L., & LM, C. (2026). Design of a novel intelligent active magnetic canceling system for mitigating extremely low frequency magnetic interference in high tech fab.. The Review of scientific instruments. https://doi.org/10.1063/5.0305429

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