A drop-on-demand generator for liquid metal toward extreme ultraviolet (EUV) applications

Daner Chen, Li Chen, Qingjiang Liu, Tianqi Zhai, Xinyan Zhao, Weiwei Deng

Open source

DOI: 10.1063/5.0348092
Published: 2026-11-01
Container: Review of Scientific Instruments
Publisher: AIP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1063/5.0348092,
  title = {A drop-on-demand generator for liquid metal toward extreme ultraviolet (EUV) applications},
  author = {Daner Chen and Li Chen and Qingjiang Liu and Tianqi Zhai and Xinyan Zhao and Weiwei Deng},
  year = {2026},
  journal = {Review of Scientific Instruments},
  doi = {10.1063/5.0348092},
  url = {https://doi.org/10.1063/5.0348092}
}

RIS

TY  - JOUR
TI  - A drop-on-demand generator for liquid metal toward extreme ultraviolet (EUV) applications
AU  - Daner Chen
AU  - Li Chen
AU  - Qingjiang Liu
AU  - Tianqi Zhai
AU  - Xinyan Zhao
AU  - Weiwei Deng
PY  - 2026
JO  - Review of Scientific Instruments
DO  - 10.1063/5.0348092
UR  - https://doi.org/10.1063/5.0348092
ER  -

APA

Chen, D., Chen, L., Liu, Q., Zhai, T., Zhao, X., & Deng, W. (2026). A drop-on-demand generator for liquid metal toward extreme ultraviolet (EUV) applications. Review of Scientific Instruments. https://doi.org/10.1063/5.0348092

Source records

crossref · retrieved 2026-11-03T20:15:27.615Z