Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges
- DOI
- 10.1088/0022-3727/43/12/124016
- Published
- 2010-03-11
- Container
- Journal of Physics D: Applied Physics
- Publisher
- IOP Publishing
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1088/0022-3727/43/12/124016,
title = {Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges},
author = {J Schulze and E Schüngel and Z Donkó and D Luggenhölscher and U Czarnetzki},
year = {2010},
journal = {Journal of Physics D: Applied Physics},
doi = {10.1088/0022-3727/43/12/124016},
url = {https://doi.org/10.1088/0022-3727/43/12/124016}
}RIS
TY - JOUR TI - Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges AU - J Schulze AU - E Schüngel AU - Z Donkó AU - D Luggenhölscher AU - U Czarnetzki PY - 2010 JO - Journal of Physics D: Applied Physics DO - 10.1088/0022-3727/43/12/124016 UR - https://doi.org/10.1088/0022-3727/43/12/124016 ER -
APA
Schulze, J., Schüngel, E., Donkó, Z., Luggenhölscher, D., & Czarnetzki, U. (2010). Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges. Journal of Physics D: Applied Physics. https://doi.org/10.1088/0022-3727/43/12/124016
Source records
- crossref · retrieved 2026-11-07T23:21:10.186Z