Modelling of low energy ion sputtering from oxide surfaces

T Kubart, T Nyberg, S Berg

Open source

DOI: 10.1088/0022-3727/43/20/205204
Published: 2010-05-06
Container: Journal of Physics D: Applied Physics
Publisher: IOP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1088/0022-3727/43/20/205204,
  title = {Modelling of low energy ion sputtering from oxide surfaces},
  author = {T Kubart and T Nyberg and S Berg},
  year = {2010},
  journal = {Journal of Physics D: Applied Physics},
  doi = {10.1088/0022-3727/43/20/205204},
  url = {https://doi.org/10.1088/0022-3727/43/20/205204}
}

RIS

TY  - JOUR
TI  - Modelling of low energy ion sputtering from oxide surfaces
AU  - T Kubart
AU  - T Nyberg
AU  - S Berg
PY  - 2010
JO  - Journal of Physics D: Applied Physics
DO  - 10.1088/0022-3727/43/20/205204
UR  - https://doi.org/10.1088/0022-3727/43/20/205204
ER  -

APA

Kubart, T., Nyberg, T., & Berg, S. (2010). Modelling of low energy ion sputtering from oxide surfaces. Journal of Physics D: Applied Physics. https://doi.org/10.1088/0022-3727/43/20/205204

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crossref · retrieved 2026-11-08T21:50:09.485Z