Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate
- DOI
- 10.1088/0022-3727/44/2/025202
- Published
- 2010-12-16
- Container
- Journal of Physics D: Applied Physics
- Publisher
- IOP Publishing
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1088/0022-3727/44/2/025202,
title = {Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate},
author = {H Naghshara and S Sobhanian and S Khorram and N Sadeghi},
year = {2010},
journal = {Journal of Physics D: Applied Physics},
doi = {10.1088/0022-3727/44/2/025202},
url = {https://doi.org/10.1088/0022-3727/44/2/025202}
}RIS
TY - JOUR TI - Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate AU - H Naghshara AU - S Sobhanian AU - S Khorram AU - N Sadeghi PY - 2010 JO - Journal of Physics D: Applied Physics DO - 10.1088/0022-3727/44/2/025202 UR - https://doi.org/10.1088/0022-3727/44/2/025202 ER -
APA
Naghshara, H., Sobhanian, S., Khorram, S., & Sadeghi, N. (2010). Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate. Journal of Physics D: Applied Physics. https://doi.org/10.1088/0022-3727/44/2/025202
Source records
- crossref · retrieved 2026-09-25T18:21:30.013Z