Spark assisted chemical engraving (SACE) in microfactory

R Wüthrich, K Fujisaki, Ph Couthy, L A Hof, H Bleuler

Open source

DOI: 10.1088/0960-1317/15/10/s04
Published: 2005-09-06
Container: Journal of Micromechanics and Microengineering
Publisher: IOP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1088/0960-1317/15/10/s04,
  title = {Spark assisted chemical engraving (SACE) in microfactory},
  author = {R Wüthrich and K Fujisaki and Ph Couthy and L A Hof and H Bleuler},
  year = {2005},
  journal = {Journal of Micromechanics and Microengineering},
  doi = {10.1088/0960-1317/15/10/s04},
  url = {https://doi.org/10.1088/0960-1317/15/10/s04}
}

RIS

TY  - JOUR
TI  - Spark assisted chemical engraving (SACE) in microfactory
AU  - R Wüthrich
AU  - K Fujisaki
AU  - Ph Couthy
AU  - L A Hof
AU  - H Bleuler
PY  - 2005
JO  - Journal of Micromechanics and Microengineering
DO  - 10.1088/0960-1317/15/10/s04
UR  - https://doi.org/10.1088/0960-1317/15/10/s04
ER  -

APA

Wüthrich, R., Fujisaki, K., Couthy, P., Hof, L. A., & Bleuler, H. (2005). Spark assisted chemical engraving (SACE) in microfactory. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/15/10/s04

Source records

crossref · retrieved 2026-09-26T06:55:48.434Z