The current signal in spark-assisted chemical engraving (SACE): what does it tell us?

R Wüthrich, U Spaelter, H Bleuler

Open source

DOI: 10.1088/0960-1317/16/4/014
Published: 2006-03-14
Container: Journal of Micromechanics and Microengineering
Publisher: IOP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1088/0960-1317/16/4/014,
  title = {The current signal in spark-assisted chemical engraving (SACE): what does it tell us?},
  author = {R Wüthrich and U Spaelter and H Bleuler},
  year = {2006},
  journal = {Journal of Micromechanics and Microengineering},
  doi = {10.1088/0960-1317/16/4/014},
  url = {https://doi.org/10.1088/0960-1317/16/4/014}
}

RIS

TY  - JOUR
TI  - The current signal in spark-assisted chemical engraving (SACE): what does it tell us?
AU  - R Wüthrich
AU  - U Spaelter
AU  - H Bleuler
PY  - 2006
JO  - Journal of Micromechanics and Microengineering
DO  - 10.1088/0960-1317/16/4/014
UR  - https://doi.org/10.1088/0960-1317/16/4/014
ER  -

APA

Wüthrich, R., Spaelter, U., & Bleuler, H. (2006). The current signal in spark-assisted chemical engraving (SACE): what does it tell us?. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/16/4/014

Source records

crossref · retrieved 2026-09-26T21:50:04.141Z