A batch-fabricated and electret-free silicon electrostatic vibration energy harvester
- DOI
- 10.1088/0960-1317/19/11/115025
- Published
- 2009-10-12
- Container
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Open access
- unknown
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uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1088/0960-1317/19/11/115025,
title = {A batch-fabricated and electret-free silicon electrostatic vibration energy harvester},
author = {P Basset and D Galayko and A Mahmood Paracha and F Marty and A Dudka and T Bourouina},
year = {2009},
journal = {Journal of Micromechanics and Microengineering},
doi = {10.1088/0960-1317/19/11/115025},
url = {https://doi.org/10.1088/0960-1317/19/11/115025}
}RIS
TY - JOUR TI - A batch-fabricated and electret-free silicon electrostatic vibration energy harvester AU - P Basset AU - D Galayko AU - A Mahmood Paracha AU - F Marty AU - A Dudka AU - T Bourouina PY - 2009 JO - Journal of Micromechanics and Microengineering DO - 10.1088/0960-1317/19/11/115025 UR - https://doi.org/10.1088/0960-1317/19/11/115025 ER -
APA
Basset, P., Galayko, D., Paracha, A. M., Marty, F., Dudka, A., & Bourouina, T. (2009). A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/19/11/115025
Source records
- crossref · retrieved 2026-09-26T04:32:15.860Z