Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges

Badri Ramamurthi, Demetre J Economou, Igor D Kaganovich

Open source

DOI
10.1088/0963-0252/12/2/308
Published
2003-03-14
Container
Plasma Sources Science and Technology
Publisher
IOP Publishing
Open access
unknown

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BibTeX

@article{allodium:10.1088/0963-0252/12/2/308,
  title = {Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges},
  author = {Badri Ramamurthi and Demetre J Economou and Igor D Kaganovich},
  year = {2003},
  journal = {Plasma Sources Science and Technology},
  doi = {10.1088/0963-0252/12/2/308},
  url = {https://doi.org/10.1088/0963-0252/12/2/308}
}

RIS

TY  - JOUR
TI  - Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges
AU  - Badri Ramamurthi
AU  - Demetre J Economou
AU  - Igor D Kaganovich
PY  - 2003
JO  - Plasma Sources Science and Technology
DO  - 10.1088/0963-0252/12/2/308
UR  - https://doi.org/10.1088/0963-0252/12/2/308
ER  - 

APA

Ramamurthi, B., Economou, D. J., & Kaganovich, I. D. (2003). Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges. Plasma Sources Science and Technology. https://doi.org/10.1088/0963-0252/12/2/308

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