Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
- DOI
- 10.1088/0963-0252/24/3/034002
- Published
- 2015-04-16
- Container
- Plasma Sources Science and Technology
- Publisher
- IOP Publishing
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1088/0963-0252/24/3/034002,
title = {Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas},
author = {A Derzsi and I Korolov and E Schüngel and Z Donkó and J Schulze},
year = {2015},
journal = {Plasma Sources Science and Technology},
doi = {10.1088/0963-0252/24/3/034002},
url = {https://doi.org/10.1088/0963-0252/24/3/034002}
}RIS
TY - JOUR TI - Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas AU - A Derzsi AU - I Korolov AU - E Schüngel AU - Z Donkó AU - J Schulze PY - 2015 JO - Plasma Sources Science and Technology DO - 10.1088/0963-0252/24/3/034002 UR - https://doi.org/10.1088/0963-0252/24/3/034002 ER -
APA
Derzsi, A., Korolov, I., Schüngel, E., Donkó, Z., & Schulze, J. (2015). Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas. Plasma Sources Science and Technology. https://doi.org/10.1088/0963-0252/24/3/034002
Source records
- crossref · retrieved 2026-11-03T19:40:57.734Z