Advances in laser-based lithography and processing of semiconductors and insulators

Volodymyr Dzhagan, Yuriy Azhniuk, Oleksandr Dubikovskyi, Dietrich R T Zahn

Open source

DOI: 10.1088/1361-648x/ae786d
Published: 2026-06-23
Container: Journal of Physics: Condensed Matter
Publisher: IOP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1088/1361-648x/ae786d,
  title = {Advances in laser-based lithography and processing of semiconductors and insulators},
  author = {Volodymyr Dzhagan and Yuriy Azhniuk and Oleksandr Dubikovskyi and Dietrich R T Zahn},
  year = {2026},
  journal = {Journal of Physics: Condensed Matter},
  doi = {10.1088/1361-648x/ae786d},
  url = {https://doi.org/10.1088/1361-648x/ae786d}
}

RIS

TY  - JOUR
TI  - Advances in laser-based lithography and processing of semiconductors and insulators
AU  - Volodymyr Dzhagan
AU  - Yuriy Azhniuk
AU  - Oleksandr Dubikovskyi
AU  - Dietrich R T Zahn
PY  - 2026
JO  - Journal of Physics: Condensed Matter
DO  - 10.1088/1361-648x/ae786d
UR  - https://doi.org/10.1088/1361-648x/ae786d
ER  -

APA

Dzhagan, V., Azhniuk, Y., Dubikovskyi, O., & Zahn, D. R. T. (2026). Advances in laser-based lithography and processing of semiconductors and insulators. Journal of Physics: Condensed Matter. https://doi.org/10.1088/1361-648x/ae786d

Source records

crossref · retrieved 2026-09-26T02:39:05.758Z