Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy.
- DOI
- 10.1088/1361-6501/aae4c2
- Published
- 2018 Dec
- Container
- Measurement science & technology
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1088/1361-6501/aae4c2,
title = {Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy.},
author = {Attota RK and Kang H and Scott K and Allen R and Vladar AE and Bunday B},
year = {2018},
journal = {Measurement science \& technology},
doi = {10.1088/1361-6501/aae4c2},
url = {https://doi.org/10.1088/1361-6501/aae4c2}
}RIS
TY - JOUR TI - Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy. AU - Attota RK AU - Kang H AU - Scott K AU - Allen R AU - Vladar AE AU - Bunday B PY - 2018 JO - Measurement science & technology DO - 10.1088/1361-6501/aae4c2 UR - https://doi.org/10.1088/1361-6501/aae4c2 ER -
APA
RK, A., H, K., K, S., R, A., AE, V., & B, B. (2018). Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy.. Measurement science & technology. https://doi.org/10.1088/1361-6501/aae4c2
Source records
- pubmed · retrieved 2026-09-26T00:48:23.716Z