A strategy to fabricate nanostructures with sub-nanometer line edge roughness.

Zhuang X, Deng Y, Zhang Y, Wang K, Chen Y, Gao S, Xu J, Wang L, Cheng X

Open source

DOI
10.1088/1361-6528/ad6e88
Published
2024 Sep 25
Container
Nanotechnology
Publisher
Not recorded
Open access
unknown

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BibTeX

@article{allodium:10.1088/1361-6528/ad6e88,
  title = {A strategy to fabricate nanostructures with sub-nanometer line edge roughness.},
  author = {Zhuang X and Deng Y and Zhang Y and Wang K and Chen Y and Gao S and Xu J and Wang L and Cheng X},
  year = {2024},
  journal = {Nanotechnology},
  doi = {10.1088/1361-6528/ad6e88},
  url = {https://doi.org/10.1088/1361-6528/ad6e88}
}

RIS

TY  - JOUR
TI  - A strategy to fabricate nanostructures with sub-nanometer line edge roughness.
AU  - Zhuang X
AU  - Deng Y
AU  - Zhang Y
AU  - Wang K
AU  - Chen Y
AU  - Gao S
AU  - Xu J
AU  - Wang L
AU  - Cheng X
PY  - 2024
JO  - Nanotechnology
DO  - 10.1088/1361-6528/ad6e88
UR  - https://doi.org/10.1088/1361-6528/ad6e88
ER  - 

APA

X, Z., Y, D., Y, Z., K, W., Y, C., S, G., J, X., L, W., & X, C. (2024). A strategy to fabricate nanostructures with sub-nanometer line edge roughness.. Nanotechnology. https://doi.org/10.1088/1361-6528/ad6e88

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