A strategy to fabricate nanostructures with sub-nanometer line edge roughness.
- DOI
- 10.1088/1361-6528/ad6e88
- Published
- 2024 Sep 25
- Container
- Nanotechnology
- Publisher
- Not recorded
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1088/1361-6528/ad6e88,
title = {A strategy to fabricate nanostructures with sub-nanometer line edge roughness.},
author = {Zhuang X and Deng Y and Zhang Y and Wang K and Chen Y and Gao S and Xu J and Wang L and Cheng X},
year = {2024},
journal = {Nanotechnology},
doi = {10.1088/1361-6528/ad6e88},
url = {https://doi.org/10.1088/1361-6528/ad6e88}
}RIS
TY - JOUR TI - A strategy to fabricate nanostructures with sub-nanometer line edge roughness. AU - Zhuang X AU - Deng Y AU - Zhang Y AU - Wang K AU - Chen Y AU - Gao S AU - Xu J AU - Wang L AU - Cheng X PY - 2024 JO - Nanotechnology DO - 10.1088/1361-6528/ad6e88 UR - https://doi.org/10.1088/1361-6528/ad6e88 ER -
APA
X, Z., Y, D., Y, Z., K, W., Y, C., S, G., J, X., L, W., & X, C. (2024). A strategy to fabricate nanostructures with sub-nanometer line edge roughness.. Nanotechnology. https://doi.org/10.1088/1361-6528/ad6e88
Source records
- pubmed · retrieved 2026-09-26T00:54:37.068Z