Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.

Chen Z, An N, Miao L, Zhang Y, Zhai Y

DOI: 10.1088/1361-6528/ae607e
Published: 2026 Apr 24
Container: Nanotechnology
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1088/1361-6528/ae607e,
  title = {Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.},
  author = {Chen Z and An N and Miao L and Zhang Y and Zhai Y},
  year = {2026},
  journal = {Nanotechnology},
  doi = {10.1088/1361-6528/ae607e},
  url = {https://doi.org/10.1088/1361-6528/ae607e}
}

RIS

TY  - JOUR
TI  - Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.
AU  - Chen Z
AU  - An N
AU  - Miao L
AU  - Zhang Y
AU  - Zhai Y
PY  - 2026
JO  - Nanotechnology
DO  - 10.1088/1361-6528/ae607e
UR  - https://doi.org/10.1088/1361-6528/ae607e
ER  -

APA

Z, C., N, A., L, M., Y, Z., & Y, Z. (2026). Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.. Nanotechnology. https://doi.org/10.1088/1361-6528/ae607e

Source records

pubmed · retrieved 2026-09-26T23:34:42.790Z