A review of selected topics in interferometric optical metrology

Peter J de Groot

Open source

DOI: 10.1088/1361-6633/ab092d
Published: 2019-04-23
Container: Reports on Progress in Physics
Publisher: IOP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1088/1361-6633/ab092d,
  title = {A review of selected topics in interferometric optical metrology},
  author = {Peter J de Groot},
  year = {2019},
  journal = {Reports on Progress in Physics},
  doi = {10.1088/1361-6633/ab092d},
  url = {https://doi.org/10.1088/1361-6633/ab092d}
}

RIS

TY  - JOUR
TI  - A review of selected topics in interferometric optical metrology
AU  - Peter J de Groot
PY  - 2019
JO  - Reports on Progress in Physics
DO  - 10.1088/1361-6633/ab092d
UR  - https://doi.org/10.1088/1361-6633/ab092d
ER  -

APA

Groot, P. J. D. (2019). A review of selected topics in interferometric optical metrology. Reports on Progress in Physics. https://doi.org/10.1088/1361-6633/ab092d

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crossref · retrieved 2026-09-26T22:58:00.851Z