Similarity scaling for low-pressure capacitive radio-frequency CF_{4} plasmas across operation modes.

Zhou Z, Wang X, Li H, Schulze J, Hartmann P, Donkó Z, Liu Y, Fu Y

DOI: 10.1103/7z84-ccpw
Published: 2026 Feb
Container: Physical review. E
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1103/7z84-ccpw,
  title = {Similarity scaling for low-pressure capacitive radio-frequency CF\_\{4\} plasmas across operation modes.},
  author = {Zhou Z and Wang X and Li H and Schulze J and Hartmann P and Donkó Z and Liu Y and Fu Y},
  year = {2026},
  journal = {Physical review. E},
  doi = {10.1103/7z84-ccpw},
  url = {https://doi.org/10.1103/7z84-ccpw}
}

RIS

TY  - JOUR
TI  - Similarity scaling for low-pressure capacitive radio-frequency CF_{4} plasmas across operation modes.
AU  - Zhou Z
AU  - Wang X
AU  - Li H
AU  - Schulze J
AU  - Hartmann P
AU  - Donkó Z
AU  - Liu Y
AU  - Fu Y
PY  - 2026
JO  - Physical review. E
DO  - 10.1103/7z84-ccpw
UR  - https://doi.org/10.1103/7z84-ccpw
ER  -

APA

Z, Z., X, W., H, L., J, S., P, H., Z, D., Y, L., & Y, F. (2026). Similarity scaling for low-pressure capacitive radio-frequency CF_{4} plasmas across operation modes.. Physical review. E. https://doi.org/10.1103/7z84-ccpw

Source records

pubmed · retrieved 2026-09-26T20:59:14.198Z