Crossing the Resolution Limit in Near-Infrared Imaging of Silicon Chips: Targeting 10-nm Node Technology

Krishna Agarwal, Rui Chen, Lian Ser Koh, Colin J. R. Sheppard, Xudong Chen

Open source

DOI: 10.1103/physrevx.5.021014
Published: 2015-05-06
Container: Physical Review X
Publisher: American Physical Society (APS)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1103/physrevx.5.021014,
  title = {Crossing the Resolution Limit in Near-Infrared Imaging of Silicon Chips: Targeting 10-nm Node Technology},
  author = {Krishna Agarwal and Rui Chen and Lian Ser Koh and Colin J. R. Sheppard and Xudong Chen},
  year = {2015},
  journal = {Physical Review X},
  doi = {10.1103/physrevx.5.021014},
  url = {https://doi.org/10.1103/physrevx.5.021014}
}

RIS

TY  - JOUR
TI  - Crossing the Resolution Limit in Near-Infrared Imaging of Silicon Chips: Targeting 10-nm Node Technology
AU  - Krishna Agarwal
AU  - Rui Chen
AU  - Lian Ser Koh
AU  - Colin J. R. Sheppard
AU  - Xudong Chen
PY  - 2015
JO  - Physical Review X
DO  - 10.1103/physrevx.5.021014
UR  - https://doi.org/10.1103/physrevx.5.021014
ER  -

APA

Agarwal, K., Chen, R., Koh, L. S., Sheppard, C. J. R., & Chen, X. (2015). Crossing the Resolution Limit in Near-Infrared Imaging of Silicon Chips: Targeting 10-nm Node Technology. Physical Review X. https://doi.org/10.1103/physrevx.5.021014

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crossref · retrieved 2026-09-26T08:09:47.317Z