In-line defect sampling methodology in yield management: an integrated framework
- DOI
- 10.1109/66.542166
- Published
- 1996
- Container
- IEEE Transactions on Semiconductor Manufacturing
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Open access
- unknown
Credibility signals
uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1109/66.542166,
title = {In-line defect sampling methodology in yield management: an integrated framework},
author = {R.K. Nurani and R. Akella and A.J. Strojwas},
year = {1996},
journal = {IEEE Transactions on Semiconductor Manufacturing},
doi = {10.1109/66.542166},
url = {https://doi.org/10.1109/66.542166}
}RIS
TY - JOUR TI - In-line defect sampling methodology in yield management: an integrated framework AU - R.K. Nurani AU - R. Akella AU - A.J. Strojwas PY - 1996 JO - IEEE Transactions on Semiconductor Manufacturing DO - 10.1109/66.542166 UR - https://doi.org/10.1109/66.542166 ER -
APA
Nurani, R., Akella, R., & Strojwas, A. (1996). In-line defect sampling methodology in yield management: an integrated framework. IEEE Transactions on Semiconductor Manufacturing. https://doi.org/10.1109/66.542166
Source records
- crossref · retrieved 2026-11-10T16:46:47.506Z