A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition
- DOI
- 10.1109/access.2021.3106171
- Published
- 2021
- Container
- IEEE Access
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1109/access.2021.3106171,
title = {A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition},
author = {Uzma Batool and Mohd Ibrahim Shapiai and Muhammad Tahir and Zool Hilmi Ismail and Noor Jannah Zakaria and Ahmed Elfakharany},
year = {2021},
journal = {IEEE Access},
doi = {10.1109/access.2021.3106171},
url = {https://doi.org/10.1109/access.2021.3106171}
}RIS
TY - JOUR TI - A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition AU - Uzma Batool AU - Mohd Ibrahim Shapiai AU - Muhammad Tahir AU - Zool Hilmi Ismail AU - Noor Jannah Zakaria AU - Ahmed Elfakharany PY - 2021 JO - IEEE Access DO - 10.1109/access.2021.3106171 UR - https://doi.org/10.1109/access.2021.3106171 ER -
APA
Batool, U., Shapiai, M. I., Tahir, M., Ismail, Z. H., Zakaria, N. J., & Elfakharany, A. (2021). A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition. IEEE Access. https://doi.org/10.1109/access.2021.3106171
Source records
- doaj · retrieved 2026-09-25T10:05:38.014Z