A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition

Uzma Batool, Mohd Ibrahim Shapiai, Muhammad Tahir, Zool Hilmi Ismail, Noor Jannah Zakaria, Ahmed Elfakharany

Open source

DOI
10.1109/access.2021.3106171
Published
2021
Container
IEEE Access
Publisher
Not recorded
Open access
yes

Credibility signals

uncertain Score 53/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

Cite this work

BibTeX

@article{allodium:10.1109/access.2021.3106171,
  title = {A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition},
  author = {Uzma Batool and Mohd Ibrahim Shapiai and Muhammad Tahir and Zool Hilmi Ismail and Noor Jannah Zakaria and Ahmed Elfakharany},
  year = {2021},
  journal = {IEEE Access},
  doi = {10.1109/access.2021.3106171},
  url = {https://doi.org/10.1109/access.2021.3106171}
}

RIS

TY  - JOUR
TI  - A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition
AU  - Uzma Batool
AU  - Mohd Ibrahim Shapiai
AU  - Muhammad Tahir
AU  - Zool Hilmi Ismail
AU  - Noor Jannah Zakaria
AU  - Ahmed Elfakharany
PY  - 2021
JO  - IEEE Access
DO  - 10.1109/access.2021.3106171
UR  - https://doi.org/10.1109/access.2021.3106171
ER  - 

APA

Batool, U., Shapiai, M. I., Tahir, M., Ismail, Z. H., Zakaria, N. J., & Elfakharany, A. (2021). A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition. IEEE Access. https://doi.org/10.1109/access.2021.3106171

Source records