Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment
- DOI
- 10.1109/access.2022.3204278
- Published
- 2022
- Container
- IEEE Access
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1109/access.2022.3204278,
title = {Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment},
author = {Riccardo Emanuele Sarpietro and Carmelo Pino and Salvatore Coffa and Angelo Messina and Simone Palazzo and Sebastiano Battiato and Concetto Spampinato and Francesco Rundo},
year = {2022},
journal = {IEEE Access},
doi = {10.1109/access.2022.3204278},
url = {https://doi.org/10.1109/access.2022.3204278}
}RIS
TY - JOUR TI - Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment AU - Riccardo Emanuele Sarpietro AU - Carmelo Pino AU - Salvatore Coffa AU - Angelo Messina AU - Simone Palazzo AU - Sebastiano Battiato AU - Concetto Spampinato AU - Francesco Rundo PY - 2022 JO - IEEE Access DO - 10.1109/access.2022.3204278 UR - https://doi.org/10.1109/access.2022.3204278 ER -
APA
Sarpietro, R. E., Pino, C., Coffa, S., Messina, A., Palazzo, S., Battiato, S., Spampinato, C., & Rundo, F. (2022). Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment. IEEE Access. https://doi.org/10.1109/access.2022.3204278
Source records
- crossref · retrieved 2026-09-25T07:22:34.953Z