Mixed-Defect Wafer Map Classification Using CapsNet-Based Models With Precise Scratch-Pattern Reconstruction
- DOI
- 10.1109/access.2025.3621299
- Published
- 2025
- Container
- IEEE Access
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1109/access.2025.3621299,
title = {Mixed-Defect Wafer Map Classification Using CapsNet-Based Models With Precise Scratch-Pattern Reconstruction},
author = {Yoshikazu Nagamura and Yuki Yamanaka and Itsuki Fujita and Masayuki Arai and Satoshi Fukumoto},
year = {2025},
journal = {IEEE Access},
doi = {10.1109/access.2025.3621299},
url = {https://doi.org/10.1109/access.2025.3621299}
}RIS
TY - JOUR TI - Mixed-Defect Wafer Map Classification Using CapsNet-Based Models With Precise Scratch-Pattern Reconstruction AU - Yoshikazu Nagamura AU - Yuki Yamanaka AU - Itsuki Fujita AU - Masayuki Arai AU - Satoshi Fukumoto PY - 2025 JO - IEEE Access DO - 10.1109/access.2025.3621299 UR - https://doi.org/10.1109/access.2025.3621299 ER -
APA
Nagamura, Y., Yamanaka, Y., Fujita, I., Arai, M., & Fukumoto, S. (2025). Mixed-Defect Wafer Map Classification Using CapsNet-Based Models With Precise Scratch-Pattern Reconstruction. IEEE Access. https://doi.org/10.1109/access.2025.3621299
Source records
- crossref · retrieved 2026-11-10T09:57:53.387Z