Development of cost effective sampling strategy for in-line monitoring
- DOI
- 10.1109/asmc.1997.630696
- Published
- Not recorded
- Container
- 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings
- Publisher
- IEEE
- Open access
- unknown
Credibility signals
uncertain Score 58/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1109/asmc.1997.630696,
title = {Development of cost effective sampling strategy for in-line monitoring},
author = {W. Tomlinson and R.K. Nurani and M. Burns and J.G. Shanthikumar},
journal = {1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings},
doi = {10.1109/asmc.1997.630696},
url = {https://doi.org/10.1109/asmc.1997.630696}
}RIS
TY - JOUR TI - Development of cost effective sampling strategy for in-line monitoring AU - W. Tomlinson AU - R.K. Nurani AU - M. Burns AU - J.G. Shanthikumar JO - 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings DO - 10.1109/asmc.1997.630696 UR - https://doi.org/10.1109/asmc.1997.630696 ER -
APA
Tomlinson, W., Nurani, R., Burns, M., & Shanthikumar, J. (n.d.). Development of cost effective sampling strategy for in-line monitoring. 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings. https://doi.org/10.1109/asmc.1997.630696
Source records
- crossref · retrieved 2026-11-10T16:46:55.521Z