Semiconductor fab maintenance challenge and BKM in downturn economy
- DOI
- 10.1109/asmc.2002.1001609
- Published
- Not recorded
- Container
- 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
- Publisher
- IEEE
- Open access
- unknown
Credibility signals
uncertain Score 58/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1109/asmc.2002.1001609,
title = {Semiconductor fab maintenance challenge and BKM in downturn economy},
author = {T.J. Massie},
journal = {13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)},
doi = {10.1109/asmc.2002.1001609},
url = {https://doi.org/10.1109/asmc.2002.1001609}
}RIS
TY - JOUR TI - Semiconductor fab maintenance challenge and BKM in downturn economy AU - T.J. Massie JO - 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) DO - 10.1109/asmc.2002.1001609 UR - https://doi.org/10.1109/asmc.2002.1001609 ER -
APA
Massie, T. (n.d.). Semiconductor fab maintenance challenge and BKM in downturn economy. 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259). https://doi.org/10.1109/asmc.2002.1001609
Source records
- crossref · retrieved 2026-09-27T05:21:47.024Z