Semiconductor fab maintenance challenge and BKM in downturn economy

T.J. Massie

Open source

DOI
10.1109/asmc.2002.1001609
Published
Not recorded
Container
13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
Publisher
IEEE
Open access
unknown

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BibTeX

@article{allodium:10.1109/asmc.2002.1001609,
  title = {Semiconductor fab maintenance challenge and BKM in downturn economy},
  author = {T.J. Massie},
  journal = {13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)},
  doi = {10.1109/asmc.2002.1001609},
  url = {https://doi.org/10.1109/asmc.2002.1001609}
}

RIS

TY  - JOUR
TI  - Semiconductor fab maintenance challenge and BKM in downturn economy
AU  - T.J. Massie
JO  - 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
DO  - 10.1109/asmc.2002.1001609
UR  - https://doi.org/10.1109/asmc.2002.1001609
ER  - 

APA

Massie, T. (n.d.). Semiconductor fab maintenance challenge and BKM in downturn economy. 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259). https://doi.org/10.1109/asmc.2002.1001609

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