Ultra-High Space-Time Localization of Laser Energy for 3D Fabrication Inside Semiconductors
- DOI
- 10.1109/cleo/europe-eqec57999.2023.10232167
- Published
- 2023-06-26
- Container
- 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)
- Publisher
- IEEE
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1109/cleo/europe-eqec57999.2023.10232167,
title = {Ultra-High Space-Time Localization of Laser Energy for 3D Fabrication Inside Semiconductors},
author = {Andong Wang and Patrick Salter and David Grojo and Martin Booth},
year = {2023},
journal = {2023 Conference on Lasers and Electro-Optics Europe \& European Quantum Electronics Conference (CLEO/Europe-EQEC)},
doi = {10.1109/cleo/europe-eqec57999.2023.10232167},
url = {https://doi.org/10.1109/cleo/europe-eqec57999.2023.10232167}
}RIS
TY - JOUR TI - Ultra-High Space-Time Localization of Laser Energy for 3D Fabrication Inside Semiconductors AU - Andong Wang AU - Patrick Salter AU - David Grojo AU - Martin Booth PY - 2023 JO - 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) DO - 10.1109/cleo/europe-eqec57999.2023.10232167 UR - https://doi.org/10.1109/cleo/europe-eqec57999.2023.10232167 ER -
APA
Wang, A., Salter, P., Grojo, D., & Booth, M. (2023). Ultra-High Space-Time Localization of Laser Energy for 3D Fabrication Inside Semiconductors. 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). https://doi.org/10.1109/cleo/europe-eqec57999.2023.10232167
Source records
- crossref · retrieved 2026-09-26T16:07:32.138Z