Fabrication of low-cost capacitive accelerometers by 3D microforming

W. Qu, C. Wenzel, K. Drescher

Open source

DOI
10.1109/commad.1996.610166
Published
Not recorded
Container
1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings
Publisher
IEEE
Open access
unknown

Credibility signals

uncertain Score 58/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

Cite this work

BibTeX

@article{allodium:10.1109/commad.1996.610166,
  title = {Fabrication of low-cost capacitive accelerometers by 3D microforming},
  author = {W. Qu and C. Wenzel and K. Drescher},
  journal = {1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings},
  doi = {10.1109/commad.1996.610166},
  url = {https://doi.org/10.1109/commad.1996.610166}
}

RIS

TY  - JOUR
TI  - Fabrication of low-cost capacitive accelerometers by 3D microforming
AU  - W. Qu
AU  - C. Wenzel
AU  - K. Drescher
JO  - 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings
DO  - 10.1109/commad.1996.610166
UR  - https://doi.org/10.1109/commad.1996.610166
ER  - 

APA

Qu, W., Wenzel, C., & Drescher, K. (n.d.). Fabrication of low-cost capacitive accelerometers by 3D microforming. 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings. https://doi.org/10.1109/commad.1996.610166

Source records