Fabrication of low-cost capacitive accelerometers by 3D microforming
- DOI
- 10.1109/commad.1996.610166
- Published
- Not recorded
- Container
- 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings
- Publisher
- IEEE
- Open access
- unknown
Credibility signals
uncertain Score 58/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1109/commad.1996.610166,
title = {Fabrication of low-cost capacitive accelerometers by 3D microforming},
author = {W. Qu and C. Wenzel and K. Drescher},
journal = {1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings},
doi = {10.1109/commad.1996.610166},
url = {https://doi.org/10.1109/commad.1996.610166}
}RIS
TY - JOUR TI - Fabrication of low-cost capacitive accelerometers by 3D microforming AU - W. Qu AU - C. Wenzel AU - K. Drescher JO - 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings DO - 10.1109/commad.1996.610166 UR - https://doi.org/10.1109/commad.1996.610166 ER -
APA
Qu, W., Wenzel, C., & Drescher, K. (n.d.). Fabrication of low-cost capacitive accelerometers by 3D microforming. 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings. https://doi.org/10.1109/commad.1996.610166
Source records
- crossref · retrieved 2026-09-25T06:41:35.593Z