Finite element simulation of thermomechanical stress evolution in Cu/low-k interconnects during manufacturing and subsequent thermal cycling

Nathalie Chérault, Jacques Besson, C. Goldberg, N. Casanova, Marie-Hélène Berger

Open source

DOI
10.1109/essder.2005.1546692
Published
2005
Container
Not recorded
Publisher
IEEE
Open access
no

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BibTeX

@article{allodium:10.1109/essder.2005.1546692,
  title = {Finite element simulation of thermomechanical stress evolution in Cu/low-k interconnects during manufacturing and subsequent thermal cycling},
  author = {Nathalie Chérault and Jacques Besson and C. Goldberg and N. Casanova and Marie-Hélène Berger},
  year = {2005},
  doi = {10.1109/essder.2005.1546692},
  url = {https://doi.org/10.1109/essder.2005.1546692}
}

RIS

TY  - JOUR
TI  - Finite element simulation of thermomechanical stress evolution in Cu/low-k interconnects during manufacturing and subsequent thermal cycling
AU  - Nathalie Chérault
AU  - Jacques Besson
AU  - C. Goldberg
AU  - N. Casanova
AU  - Marie-Hélène Berger
PY  - 2005
DO  - 10.1109/essder.2005.1546692
UR  - https://doi.org/10.1109/essder.2005.1546692
ER  - 

APA

Chérault, N., Besson, J., Goldberg, C., Casanova, N., & Berger, M. (2005). Finite element simulation of thermomechanical stress evolution in Cu/low-k interconnects during manufacturing and subsequent thermal cycling. https://doi.org/10.1109/essder.2005.1546692

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