SIMNI SOI formed by high intensity nitrogen implantation

M.C. Poon, S.P. Wong, Y.W. Lam, P.K. Chu, J.K.O. Sin

Open source

DOI
10.1109/hkedm.1996.566298
Published
Not recorded
Container
Proceedings 1996 IEEE Hong Kong Electron Devices Meeting
Publisher
IEEE
Open access
unknown

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BibTeX

@article{allodium:10.1109/hkedm.1996.566298,
  title = {SIMNI SOI formed by high intensity nitrogen implantation},
  author = {M.C. Poon and S.P. Wong and Y.W. Lam and P.K. Chu and J.K.O. Sin},
  journal = {Proceedings 1996 IEEE Hong Kong Electron Devices Meeting},
  doi = {10.1109/hkedm.1996.566298},
  url = {https://doi.org/10.1109/hkedm.1996.566298}
}

RIS

TY  - JOUR
TI  - SIMNI SOI formed by high intensity nitrogen implantation
AU  - M.C. Poon
AU  - S.P. Wong
AU  - Y.W. Lam
AU  - P.K. Chu
AU  - J.K.O. Sin
JO  - Proceedings 1996 IEEE Hong Kong Electron Devices Meeting
DO  - 10.1109/hkedm.1996.566298
UR  - https://doi.org/10.1109/hkedm.1996.566298
ER  - 

APA

Poon, M., Wong, S., Lam, Y., Chu, P., & Sin, J. (n.d.). SIMNI SOI formed by high intensity nitrogen implantation. Proceedings 1996 IEEE Hong Kong Electron Devices Meeting. https://doi.org/10.1109/hkedm.1996.566298

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