Reduction of threshold voltage deviation in Damascene metal gate MOSFETs

A. Yagishita, T. Saito, K. Nakajima, S. Inumiya, K. Matsuo, Y. Akasaka, Y. Ozawa, H. Yano, G. Minamibaba, Y. Matsui, Y. Tsunashima, K. Suguro, T. Arikado, K. Okumura

Open source

DOI
10.1109/iedm.1999.823892
Published
Not recorded
Container
International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)
Publisher
IEEE
Open access
unknown

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BibTeX

@article{allodium:10.1109/iedm.1999.823892,
  title = {Reduction of threshold voltage deviation in Damascene metal gate MOSFETs},
  author = {A. Yagishita and T. Saito and K. Nakajima and S. Inumiya and K. Matsuo and Y. Akasaka and Y. Ozawa and H. Yano and G. Minamibaba and Y. Matsui and Y. Tsunashima and K. Suguro and T. Arikado and K. Okumura},
  journal = {International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)},
  doi = {10.1109/iedm.1999.823892},
  url = {https://doi.org/10.1109/iedm.1999.823892}
}

RIS

TY  - JOUR
TI  - Reduction of threshold voltage deviation in Damascene metal gate MOSFETs
AU  - A. Yagishita
AU  - T. Saito
AU  - K. Nakajima
AU  - S. Inumiya
AU  - K. Matsuo
AU  - Y. Akasaka
AU  - Y. Ozawa
AU  - H. Yano
AU  - G. Minamibaba
AU  - Y. Matsui
AU  - Y. Tsunashima
AU  - K. Suguro
AU  - T. Arikado
AU  - K. Okumura
JO  - International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)
DO  - 10.1109/iedm.1999.823892
UR  - https://doi.org/10.1109/iedm.1999.823892
ER  - 

APA

Yagishita, A., Saito, T., Nakajima, K., Inumiya, S., Matsuo, K., Akasaka, Y., Ozawa, Y., Yano, H., Minamibaba, G., Matsui, Y., Tsunashima, Y., Suguro, K., Arikado, T., & Okumura, K. (n.d.). Reduction of threshold voltage deviation in Damascene metal gate MOSFETs. International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318). https://doi.org/10.1109/iedm.1999.823892

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