Dynamic threshold voltage damascene metal gate MOSFET (DT-DMG-MOS) with low threshold voltage, high drive current, and uniform electrical characteristics

A. Yagishita, T. Saito, S. Inumiya, K. Matsuo, Y. Tsunashima, K. Suguro, T. Arikado

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DOI
10.1109/iedm.2000.904406
Published
Not recorded
Container
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138)
Publisher
IEEE
Open access
unknown

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BibTeX

@article{allodium:10.1109/iedm.2000.904406,
  title = {Dynamic threshold voltage damascene metal gate MOSFET (DT-DMG-MOS) with low threshold voltage, high drive current, and uniform electrical characteristics},
  author = {A. Yagishita and T. Saito and S. Inumiya and K. Matsuo and Y. Tsunashima and K. Suguro and T. Arikado},
  journal = {International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138)},
  doi = {10.1109/iedm.2000.904406},
  url = {https://doi.org/10.1109/iedm.2000.904406}
}

RIS

TY  - JOUR
TI  - Dynamic threshold voltage damascene metal gate MOSFET (DT-DMG-MOS) with low threshold voltage, high drive current, and uniform electrical characteristics
AU  - A. Yagishita
AU  - T. Saito
AU  - S. Inumiya
AU  - K. Matsuo
AU  - Y. Tsunashima
AU  - K. Suguro
AU  - T. Arikado
JO  - International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138)
DO  - 10.1109/iedm.2000.904406
UR  - https://doi.org/10.1109/iedm.2000.904406
ER  - 

APA

Yagishita, A., Saito, T., Inumiya, S., Matsuo, K., Tsunashima, Y., Suguro, K., & Arikado, T. (n.d.). Dynamic threshold voltage damascene metal gate MOSFET (DT-DMG-MOS) with low threshold voltage, high drive current, and uniform electrical characteristics. International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138). https://doi.org/10.1109/iedm.2000.904406

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