On the material depletion rate due to electromigration in a copper TSV structure

R. L. de Orio, S. Gousseau, S. Moreau, H. Cerice, S. Selberherr, A. Farcy, F. Bay, K. Inal, P. Montmitonnet

Open source

DOI
10.1109/iirw.2014.7049523
Published
2014-10
Container
2014 IEEE International Integrated Reliability Workshop Final Report (IIRW)
Publisher
IEEE
Open access
unknown

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Cite this work

BibTeX

@article{allodium:10.1109/iirw.2014.7049523,
  title = {On the material depletion rate due to electromigration in a copper TSV structure},
  author = {R. L. de Orio and S. Gousseau and S. Moreau and H. Cerice and S. Selberherr and A. Farcy and F. Bay and K. Inal and P. Montmitonnet},
  year = {2014},
  journal = {2014 IEEE International Integrated Reliability Workshop Final Report (IIRW)},
  doi = {10.1109/iirw.2014.7049523},
  url = {https://doi.org/10.1109/iirw.2014.7049523}
}

RIS

TY  - JOUR
TI  - On the material depletion rate due to electromigration in a copper TSV structure
AU  - R. L. de Orio
AU  - S. Gousseau
AU  - S. Moreau
AU  - H. Cerice
AU  - S. Selberherr
AU  - A. Farcy
AU  - F. Bay
AU  - K. Inal
AU  - P. Montmitonnet
PY  - 2014
JO  - 2014 IEEE International Integrated Reliability Workshop Final Report (IIRW)
DO  - 10.1109/iirw.2014.7049523
UR  - https://doi.org/10.1109/iirw.2014.7049523
ER  - 

APA

Orio, R. L. D., Gousseau, S., Moreau, S., Cerice, H., Selberherr, S., Farcy, A., Bay, F., Inal, K., & Montmitonnet, P. (2014). On the material depletion rate due to electromigration in a copper TSV structure. 2014 IEEE International Integrated Reliability Workshop Final Report (IIRW). https://doi.org/10.1109/iirw.2014.7049523

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